A simple top-down fabrication technique that involves scanning probe lithography on Si is presented. The writing procedure consists of a chemically selective patterning in mesitylene. Operating in an organic media is possible to perform local oxidation or solvent decomposition during the same pass by tuning the applied bias. The layer deposited with a positively biased tip with sub-100-nm lateral resolution consists of nanocrystalline graphite, as verified by Raman spectroscopy. The oxide pattern obtained in opposite polarization is later used as a mask for dry etching, showing a remarkable selectivity in SF6plasma, to produce Si nanofeatured molds.

Oxidative and carbonaceous patterning of Si surface in an organic media by scanning probe lithography / M. Lorenzoni, A. Giugni, B. Torre. - In: NANOSCALE RESEARCH LETTERS. - ISSN 1931-7573. - 8:1(2013 Feb 13), pp. 75.1-75.9. [10.1186/1556-276X-8-75]

Oxidative and carbonaceous patterning of Si surface in an organic media by scanning probe lithography

A. Giugni
Co-primo
;
2013

Abstract

A simple top-down fabrication technique that involves scanning probe lithography on Si is presented. The writing procedure consists of a chemically selective patterning in mesitylene. Operating in an organic media is possible to perform local oxidation or solvent decomposition during the same pass by tuning the applied bias. The layer deposited with a positively biased tip with sub-100-nm lateral resolution consists of nanocrystalline graphite, as verified by Raman spectroscopy. The oxide pattern obtained in opposite polarization is later used as a mask for dry etching, showing a remarkable selectivity in SF6plasma, to produce Si nanofeatured molds.
Dry etching mask; Nanocrystalline graphite; Scanning probe lithography
Settore FIS/03 - Fisica della Materia
Settore CHIM/02 - Chimica Fisica
Article (author)
File in questo prodotto:
File Dimensione Formato  
2013 - Oxidative and carbonaceous patterning of Si surface.pdf

accesso aperto

Descrizione: Articolo principale
Tipologia: Publisher's version/PDF
Dimensione 1.38 MB
Formato Adobe PDF
1.38 MB Adobe PDF Visualizza/Apri
2012 - Optical phonon modes in ordered core-shell CdSe-CdS nanorod arrays SI.pdf

accesso aperto

Descrizione: supplementary
Tipologia: Publisher's version/PDF
Dimensione 945.95 kB
Formato Adobe PDF
945.95 kB Adobe PDF Visualizza/Apri
Pubblicazioni consigliate

I documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.

Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/2434/828333
Citazioni
  • ???jsp.display-item.citation.pmc??? 0
  • Scopus 16
  • ???jsp.display-item.citation.isi??? 14
social impact