A simple top-down fabrication technique that involves scanning probe lithography on Si is presented. The writing procedure consists of a chemically selective patterning in mesitylene. Operating in an organic media is possible to perform local oxidation or solvent decomposition during the same pass by tuning the applied bias. The layer deposited with a positively biased tip with sub-100-nm lateral resolution consists of nanocrystalline graphite, as verified by Raman spectroscopy. The oxide pattern obtained in opposite polarization is later used as a mask for dry etching, showing a remarkable selectivity in SF6plasma, to produce Si nanofeatured molds.
Oxidative and carbonaceous patterning of Si surface in an organic media by scanning probe lithography / M. Lorenzoni, A. Giugni, B. Torre. - In: NANOSCALE RESEARCH LETTERS. - ISSN 1931-7573. - 8:1(2013 Feb 13), pp. 75.1-75.9. [10.1186/1556-276X-8-75]
Oxidative and carbonaceous patterning of Si surface in an organic media by scanning probe lithography
A. GiugniCo-primo
;
2013
Abstract
A simple top-down fabrication technique that involves scanning probe lithography on Si is presented. The writing procedure consists of a chemically selective patterning in mesitylene. Operating in an organic media is possible to perform local oxidation or solvent decomposition during the same pass by tuning the applied bias. The layer deposited with a positively biased tip with sub-100-nm lateral resolution consists of nanocrystalline graphite, as verified by Raman spectroscopy. The oxide pattern obtained in opposite polarization is later used as a mask for dry etching, showing a remarkable selectivity in SF6plasma, to produce Si nanofeatured molds.File | Dimensione | Formato | |
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