We will present the realization and the characterization of a Picometer Reference Actuator (PRA), a metrological instrument based on a precision linear actuator capable of 100 μm range with subnanometer accuracy, picometer resolution, and submicroradian tip-tilt pointing control. The PRA relies on an integrated multiple reflection homodyne interferometer as a high resolution and accurate internal reference, on a multiple reflection based angle sensor, for the active control of the movement straightness, and on a versatile mirrors configuration to transfer the metrological traceability to an external device. The PRA can be used for critical experiments at the nanoscale as an ultra-precise actuator itself, or as a reference actuator to calibrate displacement sensors. In particular, it has been specially designed to characterize the nonlinearities of high-resolution interferometers at the picometer scale. As an application example, we report the characterization of a heterodyne interferometer in turn dedicated to the calibration of piezo-capacitive actuators.

A 100 μm range linear actuator with picometer resolution, subnanometer accuracy and submicroradian tip-tilt error for the characterization of measuring instruments at the nanoscale / M. Pisani, A. Giugni, N. Bancone - In: EUSPEN 2017 / [a cura di] D. Billington, D. Phillips, V. Crabb, L. Delimata, C. Nesbet, J. Norman. - [s.l] : EUSPEN, 2017 Jun. - ISBN 978-099577510-7. - pp. 337-338 (( Intervento presentato al 17. convegno International Conference of the European Society for Precision Engineering and Nanotechnology : May 29th-2nd June tenutosi a Hannover nel 2017.

A 100 μm range linear actuator with picometer resolution, subnanometer accuracy and submicroradian tip-tilt error for the characterization of measuring instruments at the nanoscale

A. Giugni
Co-primo
;
2017-06

Abstract

We will present the realization and the characterization of a Picometer Reference Actuator (PRA), a metrological instrument based on a precision linear actuator capable of 100 μm range with subnanometer accuracy, picometer resolution, and submicroradian tip-tilt pointing control. The PRA relies on an integrated multiple reflection homodyne interferometer as a high resolution and accurate internal reference, on a multiple reflection based angle sensor, for the active control of the movement straightness, and on a versatile mirrors configuration to transfer the metrological traceability to an external device. The PRA can be used for critical experiments at the nanoscale as an ultra-precise actuator itself, or as a reference actuator to calibrate displacement sensors. In particular, it has been specially designed to characterize the nonlinearities of high-resolution interferometers at the picometer scale. As an application example, we report the characterization of a heterodyne interferometer in turn dedicated to the calibration of piezo-capacitive actuators.
High-resolution interferometry; Homodyne interferometer; Metrological actuator; Metrological angle sensor devices; Nanometrology; Optical path multiplier; Picometer scale
Settore FIS/01 - Fisica Sperimentale
Settore ING-IND/14 - Progettazione Meccanica e Costruzione di Macchine
Olympus
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Utilizza questo identificativo per citare o creare un link a questo documento: http://hdl.handle.net/2434/824300
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