Near-edge X-ray absorption fine structure (NEXAFS) measurements have been made on carbon nitride films containing as much as 44 at.% of nitrogen. The films have been synthesized by dual ion beam deposition (IBD) bombarding a carbon target with low-energy nitrogen ions at varying nitrogen beam energies and substrate temperatures ranging from the liquid nitrogen temperature up to 400 degrees C. The structural changes induced by the reduction of the temperature have been previously investigated [Hammer et al., J. Vac. Sci. Technol. A 15 (1) (1997) 107; Baker et al., Surf. Coat. Technol. 97 (1997) 544]. The transition from a predominantly sp(2)/sp(3) C-N amorphous arrangement to a more polymer-like structure has been confirmed and more deeply examined by X-ray absorption spectroscopy. In particular, for samples deposited at liquid nitrogen temperature, a relevant reduction of sp(2) C=C fraction has been detected. Moreover, the condensation on the growing film surface of hydrogen containing species (i.e. HCN) has been well identified by the appearance of the C-H* peak.

Near-edge X-ray absorption fine structure study of carbon nitride films / C. Lenardi, M. Baker, V. Briois, G. Lecis, P. Piseri, W. Gissler. - In: SURFACE & COATINGS TECHNOLOGY. - ISSN 0257-8972. - 125:1-3(2000), pp. 317-321. ((Intervento presentato al convegno E-MRS Conference, Symposium B: Protective Coatings and Thin Films tenutosi a Strasbourg nel 1999.

Near-edge X-ray absorption fine structure study of carbon nitride films

C. Lenardi
;
P. Piseri
Penultimo
;
2000

Abstract

Near-edge X-ray absorption fine structure (NEXAFS) measurements have been made on carbon nitride films containing as much as 44 at.% of nitrogen. The films have been synthesized by dual ion beam deposition (IBD) bombarding a carbon target with low-energy nitrogen ions at varying nitrogen beam energies and substrate temperatures ranging from the liquid nitrogen temperature up to 400 degrees C. The structural changes induced by the reduction of the temperature have been previously investigated [Hammer et al., J. Vac. Sci. Technol. A 15 (1) (1997) 107; Baker et al., Surf. Coat. Technol. 97 (1997) 544]. The transition from a predominantly sp(2)/sp(3) C-N amorphous arrangement to a more polymer-like structure has been confirmed and more deeply examined by X-ray absorption spectroscopy. In particular, for samples deposited at liquid nitrogen temperature, a relevant reduction of sp(2) C=C fraction has been detected. Moreover, the condensation on the growing film surface of hydrogen containing species (i.e. HCN) has been well identified by the appearance of the C-H* peak.
carbon nitride; dual ion beam deposition; near-edge X-ray absorption fine structure
Settore FIS/03 - Fisica della Materia
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Utilizza questo identificativo per citare o creare un link a questo documento: http://hdl.handle.net/2434/352713
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