We have investigated the feasibility of humidity sensors based on nanostructured carbon (ns-C) films produced by supersonic cluster beam deposition (SCBD). The ns-C films have been obtained using pure He as the buffer gas in the pulsed microplasma cluster source (PMCS). Films of different thickness (1–10 m) were deposited on Au contacts: resistive- and capacitive-type devices were manufactured. Resistive sensor show a flat response for relative humidity (%RH) up to 60%. Preliminary measurements performed on capacitive-type devices at room temperature in the relative humidity range 10–70% showed a linear dependence of the capacitance on RH%. Fast rise times and a sensitivity of the order of 0.1–0.5 pF/%RH favourably compare with standard commercial sensors and other advanced capacitive devices made with polymers.
First study of humidity sensors based on nanostructured carbon films produced by supersonic cluster beam deposition / M. Bruzzi, S. Miglio, M. Scaringella, G. Bongiorno, P. Piseri, A. Podestà, P. Milani. - In: SENSORS AND ACTUATORS. B, CHEMICAL. - ISSN 0925-4005. - B100:1-2(2004), pp. 173-176. [10.1016/j.snb.2003.12.046]
First study of humidity sensors based on nanostructured carbon films produced by supersonic cluster beam deposition
G. Bongiorno;P. Piseri;A. PodestàPenultimo
;P. MilaniUltimo
2004
Abstract
We have investigated the feasibility of humidity sensors based on nanostructured carbon (ns-C) films produced by supersonic cluster beam deposition (SCBD). The ns-C films have been obtained using pure He as the buffer gas in the pulsed microplasma cluster source (PMCS). Films of different thickness (1–10 m) were deposited on Au contacts: resistive- and capacitive-type devices were manufactured. Resistive sensor show a flat response for relative humidity (%RH) up to 60%. Preliminary measurements performed on capacitive-type devices at room temperature in the relative humidity range 10–70% showed a linear dependence of the capacitance on RH%. Fast rise times and a sensitivity of the order of 0.1–0.5 pF/%RH favourably compare with standard commercial sensors and other advanced capacitive devices made with polymers.Pubblicazioni consigliate
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