We have investigated the feasibility of humidity sensors based on nanostructured carbon (ns-C) films produced by supersonic cluster beam deposition (SCBD). The ns-C films have been obtained using pure He as the buffer gas in the pulsed microplasma cluster source (PMCS). Films of different thickness (1–10 m) were deposited on Au contacts: resistive- and capacitive-type devices were manufactured. Resistive sensor show a flat response for relative humidity (%RH) up to 60%. Preliminary measurements performed on capacitive-type devices at room temperature in the relative humidity range 10–70% showed a linear dependence of the capacitance on RH%. Fast rise times and a sensitivity of the order of 0.1–0.5 pF/%RH favourably compare with standard commercial sensors and other advanced capacitive devices made with polymers.
First study of humidity sensors based on nanostructured carbon films produced by supersonic cluster beam deposition / M. Bruzzi, S. Miglio, M. Scaringella, G. Bongiorno, P. Piseri, A. Podestà, P. Milani. - In: SENSORS AND ACTUATORS. B, CHEMICAL. - ISSN 0925-4005. - B100:1-2(2004), pp. 173-176.
|Titolo:||First study of humidity sensors based on nanostructured carbon films produced by supersonic cluster beam deposition|
PODESTA', ALESSANDRO (Penultimo)
MILANI, PAOLO (Ultimo)
|Parole Chiave:||Humidity sensors; Nanostructured carbon; Supersonic cluster beam deposition|
|Settore Scientifico Disciplinare:||Settore FIS/03 - Fisica della Materia|
|Data di pubblicazione:||2004|
|Digital Object Identifier (DOI):||http://dx.doi.org/10.1016/j.snb.2003.12.046|
|Appare nelle tipologie:||01 - Articolo su periodico|