Ruthenium oxide (nominally RuO2) layers 1 - 2 μm thick were prepared at 300, 400, 500 and 600 °C on quartz supports by two different procedures giving rise to so-called "cracked" and "compact" films. These films were characterized in terms of their chemical composition, their crystallinity and their resistivity as a function of temperature. A comparison of the features of the two sets of ruthenium oxide layers suggests that the resistivity is probably governed by the morphology rather than by the chemical composition.
Resistivity and temperature coefficient of resistivity of ruthenium oxide layers influence of morphology / G.A. Lodi, C.B. de Asmundis, S. Ardizzone, E.C. Sivieri, S.C. Trasatti. - In: SURFACE TECHNOLOGY. - ISSN 0376-4583. - 14:4(1981), pp. 335-343.
Resistivity and temperature coefficient of resistivity of ruthenium oxide layers influence of morphology
S. Ardizzone;
1981
Abstract
Ruthenium oxide (nominally RuO2) layers 1 - 2 μm thick were prepared at 300, 400, 500 and 600 °C on quartz supports by two different procedures giving rise to so-called "cracked" and "compact" films. These films were characterized in terms of their chemical composition, their crystallinity and their resistivity as a function of temperature. A comparison of the features of the two sets of ruthenium oxide layers suggests that the resistivity is probably governed by the morphology rather than by the chemical composition.
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