Ruthenium oxide (nominally RuO2) layers 1 - 2 μm thick were prepared at 300, 400, 500 and 600 °C on quartz supports by two different procedures giving rise to so-called "cracked" and "compact" films. These films were characterized in terms of their chemical composition, their crystallinity and their resistivity as a function of temperature. A comparison of the features of the two sets of ruthenium oxide layers suggests that the resistivity is probably governed by the morphology rather than by the chemical composition.
|Titolo:||Resistivity and temperature coefficient of resistivity of ruthenium oxide layers influence of morphology|
|Parole Chiave:||ruthenium compounds|
|Settore Scientifico Disciplinare:||Settore CHIM/02 - Chimica Fisica|
|Data di pubblicazione:||1981|
|Digital Object Identifier (DOI):||10.1016/0376-4583(81)90039-X|
|Appare nelle tipologie:||01 - Articolo su periodico|