Supersonic cluster beam deposition (SCBD) is used for fabrication of microsensors based on nanostructured titania layers. With a simple one-step post-deposition thermal treatment it is possible to modify the structural and electrical properties of the sensitive layers. Morphological, structural, and electrical characterisations are shown. The obtained sensors have very good performances in term of dynamic response to the exposure to methanol. (c) 2005 Elsevier B.V. All rights reserved.
Thermal annealing effect on nanostructured TiO2 microsensors by supersonic cluster beam deposition / E. Barborini, G. Bongiorno, A. Forleo, L. Francioso, P. Milani, I.N. Kholmanov, P. Piseri, P. Siciliano, A.M. Taurino, S. Vinati. - In: SENSORS AND ACTUATORS. B, CHEMICAL. - ISSN 0925-4005. - 111-112(2005), pp. 22-27.
Thermal annealing effect on nanostructured TiO2 microsensors by supersonic cluster beam deposition
G. BongiornoSecondo
;P. Milani;P. Piseri;
2005
Abstract
Supersonic cluster beam deposition (SCBD) is used for fabrication of microsensors based on nanostructured titania layers. With a simple one-step post-deposition thermal treatment it is possible to modify the structural and electrical properties of the sensitive layers. Morphological, structural, and electrical characterisations are shown. The obtained sensors have very good performances in term of dynamic response to the exposure to methanol. (c) 2005 Elsevier B.V. All rights reserved.
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