We report the observation by scanning electron microscopy, spatially resolved Auger electron spectroscopy, and atomic force microscopy of the thermal evolution of a microsized array of carbon dots, fabricated using supersonic cluster beam deposition through a stencil mask. We show that it is possible to obtain ordered arrays of silicon carbide microsized dots by reaching the temperature necessary for the creation of Si-C bonds, without affecting the geometry of the pristine pattern.
Cluster beam microfabrication of SiC pattern on Si(100) / E. Magnano, M. Padovani, V. Spreafico, M. Sancrotti, A. Podestà, E. Barborini, P. Piseri, P. Milani. - In: SURFACE SCIENCE. - ISSN 0039-6028. - 544:2-3(2003), pp. L709-L714.
Cluster beam microfabrication of SiC pattern on Si(100)
A. Podestà;P. PiseriPenultimo
;P. MilaniUltimo
2003
Abstract
We report the observation by scanning electron microscopy, spatially resolved Auger electron spectroscopy, and atomic force microscopy of the thermal evolution of a microsized array of carbon dots, fabricated using supersonic cluster beam deposition through a stencil mask. We show that it is possible to obtain ordered arrays of silicon carbide microsized dots by reaching the temperature necessary for the creation of Si-C bonds, without affecting the geometry of the pristine pattern.
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