In this paper we introduce recent mathematical tools for shape description called size functions. Some features of these descriptors such as robustness with respect to noise are pointed out. A first attempt to join the theory of size functions with randomness and to develop the related statistical analysis is then presented. The resulting procedure is applied to some specific problems which arise in microlithography of electronic devices.
Statistical shape analysis applied to microlitography / Alessandra Micheletti, Ermes Severgnini, Filippo Terragni, Mauro Vasconi - In: Data analysis and modeling for process control III / [a cura di] Iraj Emami, Kenneth W. Tobin Jr. - [s.l] : SPIE, 2006. - ISBN 9780819461988. - pp. 61550J 1-61550J 8 (( Intervento presentato al 3. convegno Data analysis and modeling for patterning control III tenutosi a San Jose' (US) nel 2006.
Statistical shape analysis applied to microlitography
Alessandra Micheletti;
2006
Abstract
In this paper we introduce recent mathematical tools for shape description called size functions. Some features of these descriptors such as robustness with respect to noise are pointed out. A first attempt to join the theory of size functions with randomness and to develop the related statistical analysis is then presented. The resulting procedure is applied to some specific problems which arise in microlithography of electronic devices.
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